主被动一体化空气弹簧隔振研究

面向超精密加工、制造与测量领域高精度、快响应、全频段隔振的需求，研究主被动一体化空气弹簧隔振系统。设计负刚度/准零刚度气动隔振机构，产生高静低动的非线性刚度特性，突破低频隔振与支撑刚度不足的矛盾；研究气室压力跟踪与脉动抑制方法，研究气动系统时延补偿算法，消除气动伺服系统滞后和非线性扰动，改善系统的动态特性，提升系统响应速度；基于气室压力、加速度、位移等反馈、前馈信息，建立气动主被动一体化隔振器的动力学模型,分析隔振器采用负载加速度反馈、相对位移反馈、气腔压力反馈以及基座加速度前馈控制时的控制性能，开发多信息融合的主被动隔振混合控制策略，实现全频段隔振。

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[3]Shi, Yan; Yang, ZhiGuo; Xie, Fei; Ren, Shuai; Xu, ShaoFeng ; The Research Progress of Electrical Impedance Tomography for Lung Monitoring, Frontiers in Bioengineering and Biotechnology,2021, 9

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Fig.1 Pneumatic vibration isolation platform

Fig.2 Isolator performance under different frequency vibration